Development and Benchmarking of a Quasistatic d33-meter for the Characterization of Piezoelectric Films and Nanostructures
Author
Liccardi, Stefan
Term
4. term (FYS10)
Education
Publication year
2023
Abstract
Denne afhandling præsenterer design, opbygning og benchmarking af en kvasi-statisk d33-meter til karakterisering af piezoelektriske film og nanostrukturer, med et indledende fokus på enheder baseret på nitride-nanotråde. Måleplatformen er baseret på den kvasi-statiske Berlincourt-metode, og der er udviklet en ny tilgang til kraftmåling for at forbedre signalkvaliteten ved dynamisk belastning. Opsætningen blev systematisk karakteriseret for at vurdere dens egnethed til direkte piezoelektriske målinger, herunder vurdering af stabilitet og drift. Resultaterne viste udtalt tidsafhængig drift, formentlig forårsaget af afslapning i selve prøven, hvilket begrænsede nøjagtigheden og kræver yderligere undersøgelse. Selvom der er behov for mere test og optimering for at opnå forskningskvalitet, demonstrerer arbejdet, at et højt tilpasningsbart piezometer med beskeden nøjagtighed kan bygges af almindeligt laboratorieudstyr og danner et grundlag for videre forbedringer mod anvendelser i nanoskala.
This thesis presents the design, construction, and benchmarking of a quasistatic d33-meter for characterizing piezoelectric films and nanostructures, with an initial focus on devices based on nitride nanowires. The measurement platform is built on the quasistatic Berlincourt method, and a novel force-sensing approach was developed to improve signal quality under dynamic loading. The setup was systematically characterized to assess its suitability for direct piezoelectric measurements, including evaluation of stability and drift. Measurements revealed pronounced time-dependent drift, likely stemming from relaxation within the sample, which limited accuracy and requires further investigation. While additional testing and optimization are needed to reach research-grade performance, the work demonstrates that a highly customizable piezometer with modest accuracy can be realized using common laboratory equipment, providing a foundation for future refinements toward nanoscale applications.
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